微悬臂梁表面应力的来源

Aditya G Mathad, R. Patrikar
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引用次数: 6

摘要

研究了微悬臂梁表面应力的来源、原因及影响因素。基于吸附的生物传感器经历由表面重构、底物介导的相互作用、电荷密度重分布和分子间排斥力引起的表面应力。采用Stoney方程计算所得到的表面应力。利用COMSOL Multiphysics软件对微悬臂梁进行了动力学分析和研究。梁的挠度不应超过厚度值的一半,以保持Stoney方程的精度并避免非线性。表面应力受吸附物相对于底物的覆盖率、吸附物的分子质量和对相互作用能的影响。利用Langmuir吸附等温线研究了吸附动力学和固定化对表面应力的影响。我们发现,由于表面自由能技术不依赖于材料的性质,它是测量表面应力的最佳方法
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The origin of surface stress experienced by a micro-cantilever beam
We study the origin, cause and factors influencing surface stress, experienced by a micro-cantilever beam. The adsorption based biosensor experiences surface stress caused by surface reconstruction, substrate mediated interaction, charge density redistribution and inter-molecular repulsive forces. The surface stress developed, is calculated by applying the Stoney Equation. The COMSOL Multiphysics software was used in analyzing and studying the dynamics of the micro-cantilever beam. The deflection of the beam should not exceed half the thickness value, to maintain accuracy of Stoney Equation and avoid non-linearity. It was observed that surface stress was influenced by coverage of the adsorbate relative to substrate, molecular mass of adsorbate and the pair interaction energy. The paper also demonstrates the use of Langmuir adsorption isotherm to study the adsorption kinetics and immobilization affects on surface stress. We have found that the surface free energy technique of measuring surface stress is best suited due its non dependence on material properties
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