极为稳定和恶劣环境的器件通过转移模场发射极制造方法

M. Nakamoto, J. Moon
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引用次数: 0

摘要

采用转移模发射极制造方法,利用非晶碳(a-C)作为发射极材料,制备了极稳定和恶劣环境的器件,实现了在恶劣环境下,如空间强自由基气氛、高低温气氛和氧化气体气氛下的真空纳米电子器件,如电力推进发动机、功率开关器件和场发射显示器(fed)。转移模a-C有限元分析显示出最稳定的场发射特性,发射波动比为±1.62%,为报道的最低值。提出了采用传递模有限元分析的面板和像素级电动推力器。这些电动推力器使生产大大小小的推力器变得容易。传递模a-C有限元分析具有非常稳定的场发射特性和对恶劣环境的最高抵抗力。因此,它们可用于制造高效可靠的真空电子设备,如电力推进发动机和联邦调查局,这些设备是通过使用各种反应气体和高氧化气氛制造的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Extremely stable and harsh-environment devices by Transfer Mold field emitter fabrication method
Extremely stable and harsh-environment devices have been fabricated by Transfer Mold emitter fabrication method and by using amorphous carbon (a-C) as an emitter material to realize the vacuum nanoelectronic devices such as electric propulsion engines, power switching devices and field emission displays (FEDs) in harsh environments, for example, in strong radical atmospheres of space, in high and low temperature atmospheres, and in oxidation gas atmospheres during FEDs fabrication process. Transfer Mold a-C FEAs exhibit the most stable field emission characteristics having the emission fluctuation ratio of ±1.62%, which is the lowest values ever reported. Panel and pixel electric thrusters by using Transfer Mold FEAs have been proposed. These electric thrusters make it easy to produce large and small thrusters. The Transfer Mold a-C FEAs exhibit very stable field-emission characteristics and the highest resistance to harsh environments. Therefore, they can be used to make highly efficient and reliable vacuum electronic devices such as electric propulsion engines and FEDs that are manufactured by using various reactive gases and highly oxidizing atmospheres.
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