可靠性比较研究:铝栅与金基栅GaAs mesfet

M. Benedek, B. Hewitt
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引用次数: 7

摘要

有偏置和无偏置的温度加速试验表明,在高温下,Al栅极mesfet相对于金基栅极器件的相当大的MTTF优势在较低温度下减弱。这是由于各自栅极金属化系统的活化能EA的差异(al栅极的EA= 0.8-1.2 ev,金基栅极器件的EA= 1.3-1.8 ev)。在所有情况下,寿命对数的标准差σ都小于0.3。所有类型设备的主要失效模式是IDSS的逐渐退化。杂质谱图表明,相关的失效机制是栅极金属与外延层的相互作用。已经确定,低场电阻RDS的退化不是接触电阻退化的指标,而是上述失效机制的逻辑结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A comparative reliability study: Aluminum gate vs. gold-base gate GaAs MESFETs
Temperature accelerated tests, with and without bias, show that the considerable MTTF advantage, at elevated temperature, of Al gate MESFETs over gold-base gate devices diminishes at lower temperatures. This is due to the difference in the activation energies, EA, of the respective gate metallization systems (EA= 0.8-1.2 ev for Al-gate and EA= 1.3-1.8 ev for gold-base gate devices). The standard deviation of the logarithms of the lifetimes, σ, was less than 0.3 in all cases. The primary mode of failure for all types of devices was a gradual degradation of IDSS. Impurity profiles indicated that the associated failure mechanism is a gate metal interaction with the epi-layer. It has been established that the degradation of the low-field resistance, RDS, is not an index of contact resistance degradation, but the logical consequence of the above failure mechanism.
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