为工艺优化开发聚合反应的数字孪生体

2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2022-05-02 DOI:10.1109/asmc54647.2022.9792518

Balazs Bordas, Kutup Kurt, A. Bamberg, S. Engell

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引用次数: 1

摘要

聚合物的分子量分布对其应用性能有很大影响。基于第一性原理对聚合反应过程进行动态建模比较困难，提出了一种利用分子量分布测量数据对分步生长聚合过程进行半物理或灰盒建模的方法。用工业聚合反应器的数据对该方法进行了测试。

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Developing a digital twin of a polymerization reaction for process optimization

The application performance of polymers is heavily influenced by their molecular weight distribution. As the dynamic modeling of the MWD in polymerization reactions is difficult based on first principles, a semi-physical or grey-box modeling approach is proposed for step-growth polymerization processes, utilizing molecular weight distribution measurement data. The method is tested on data from an industrial polymerization reactor.

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2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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