基于低相干干涉的米距测距仪

C. Pernechele, D. Fantinel, D. Magrin, L. Lessio, G. Rodeghiero
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引用次数: 2

摘要

白光干涉法又称低相干干涉法,是一种成熟的测量亚微米尺度三维表面形貌的技术。该技术应用于光学鉴定测试、表面计量、医学等多个领域。我们在这里提出了一种新的装置,能够以亚微米精度和一些毫米的景深(深度范围)测量物体的距离。该仪器可用于测量热机械变形和纵向光学对准。该装置内部没有任何活动部件,因此可以有效地利用它,避免了空间仪器可能出现的故障点。它可能是有用的,例如,测量机械安装或桁架变形或控制原位光学校准。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low coherence interferometry-based meter-distance range finder
White light interferometry, also known as low-coherence interferometry, is a mature technique used in metrology to measure 3D surface morphology at sub-micrometric scale. This technique is used in many fields of applications, such as optical qualification tests, surface metrology, medicine and others. We present here a new set-up able to measure the distance of an object with sub-micrometric accuracy and a depth of field (depth range) of some millimeters. The instrument is useful to measure thermo-mechanical deformations as well as longitudinal optical alignments. The set-up does not present any moving part inside and then it may be fruitfully exploited, avoiding a possible point of failure, for space instrumentation. It may be useful, for example, to measure mechanical mounting or truss deformations or to control in-situ optical alignment.
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