{"title":"光阻材料介电偶极子的弛豫特性","authors":"H. Sasazaki, A. Kawai","doi":"10.1117/12.841126","DOIUrl":null,"url":null,"abstract":"Relaxation properties of dielectric dipoles such as dielectric frequency dispersion, relaxation time, which should be optimized in structural material designing, are characterized. Relaxation times of dielectric dipoles of photo resist materials are characterized by Cole-Cole plot, which is employed to determine a dielectric relaxation time of dipole moment in polymer structure, based on traditional capacitance method in frequency range of 10mHz to 5MHz. The relaxation time of dry film resist (DFR) can be determined to be 12.1s. The validity of dielectric properties of DFR film as a structural material is discussed.","PeriodicalId":383504,"journal":{"name":"Lithography Asia","volume":"149 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Relaxation properties of dielectric dipoles of photo resist materials\",\"authors\":\"H. Sasazaki, A. Kawai\",\"doi\":\"10.1117/12.841126\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Relaxation properties of dielectric dipoles such as dielectric frequency dispersion, relaxation time, which should be optimized in structural material designing, are characterized. Relaxation times of dielectric dipoles of photo resist materials are characterized by Cole-Cole plot, which is employed to determine a dielectric relaxation time of dipole moment in polymer structure, based on traditional capacitance method in frequency range of 10mHz to 5MHz. The relaxation time of dry film resist (DFR) can be determined to be 12.1s. The validity of dielectric properties of DFR film as a structural material is discussed.\",\"PeriodicalId\":383504,\"journal\":{\"name\":\"Lithography Asia\",\"volume\":\"149 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Lithography Asia\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.841126\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Lithography Asia","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.841126","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Relaxation properties of dielectric dipoles of photo resist materials
Relaxation properties of dielectric dipoles such as dielectric frequency dispersion, relaxation time, which should be optimized in structural material designing, are characterized. Relaxation times of dielectric dipoles of photo resist materials are characterized by Cole-Cole plot, which is employed to determine a dielectric relaxation time of dipole moment in polymer structure, based on traditional capacitance method in frequency range of 10mHz to 5MHz. The relaxation time of dry film resist (DFR) can be determined to be 12.1s. The validity of dielectric properties of DFR film as a structural material is discussed.
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