基于氮化镓的MIS-HEMT器件击穿研究

F. A. Marino, D. Bisi, M. Meneghini, G. Verzellesi, E. Zanoni, M. V. Hove, S. You, S. Decoutere, D. Marcon, S. Stoffels, N. Ronchi, G. Meneghesso
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引用次数: 11

摘要

本文分析了AlGaN/GaN HEMT器件的击穿机制,重点分析了生长在硅衬底上的GaN基器件。结合实验数据和二维数值模拟,我们证明了许多物理机制都有助于增加泄漏电流,导致器件最终击穿。特别是,我们展示了即使在双异质结构hemt中,带对带现象,而不是撞击电离,是如何导致过早击穿的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Breakdown investigation in GaN-based MIS-HEMT devices
Breakdown mechanisms in AlGaN/GaN HEMT devices are here analyzed, placing particular emphasis in the analysis of GaN based device grown on silicon substrate. Based on combined experimental data and bi-dimensional numerical simulation we demonstrate that many physical mechanisms can contribute to increase the leakage current leading to the final breakdown of the device. In particular we show how band-to-band phenomena, rather than impact ionization, can be responsible of the premature breakdown even in double-heterostructure HEMTs.
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