{"title":"微机械谐振器的特性","authors":"Zhoughe Jin, Yaolin Wang, Yigang Xu, Chung Ding","doi":"10.1109/ICSICT.1995.503325","DOIUrl":null,"url":null,"abstract":"A theoretical and experimental study is presented on the response of a micromechanical resonator. Emphasis is placed on the study of double frequency and nonlinear behaviour.","PeriodicalId":286176,"journal":{"name":"Proceedings of 4th International Conference on Solid-State and IC Technology","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"The properties of micromechanical resonator\",\"authors\":\"Zhoughe Jin, Yaolin Wang, Yigang Xu, Chung Ding\",\"doi\":\"10.1109/ICSICT.1995.503325\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A theoretical and experimental study is presented on the response of a micromechanical resonator. Emphasis is placed on the study of double frequency and nonlinear behaviour.\",\"PeriodicalId\":286176,\"journal\":{\"name\":\"Proceedings of 4th International Conference on Solid-State and IC Technology\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-10-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 4th International Conference on Solid-State and IC Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSICT.1995.503325\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 4th International Conference on Solid-State and IC Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.1995.503325","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A theoretical and experimental study is presented on the response of a micromechanical resonator. Emphasis is placed on the study of double frequency and nonlinear behaviour.
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