V. Kolesov, Vladimir Anisimkin, I. Kuznetsova, E. Soldatov, S. Dagesyan, A. Melnikov, V. Kashin, A. Smirnov
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The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nanotransduces having size about 60-80 nm. These transducers were produced by using negative electron-beam nanolithography.
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