新一代集成电路厂的微环境技术和自动化系统

International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM Pub Date : 1994-06-21 DOI:10.1109/ISSM.1994.729448

M. Brain, S. Abuzeid

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引用次数: 3

摘要

将Minienvironment和SMIF系统集成到集成电路制造中提供了新的自动化要求和设计可能性。描述了一个优化的集成Minienvironment和基于smif的自动化设施的场景，并分析了其优势。最近的数据比较了世界各地各种传统的开放式和小型环境设施中的颗粒污染。

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Minienvironment Technology And Automation Systems For Next Generation IC Fabs

The integration of Minienvironment and SMIF Systems into IC fabrication provides new automation requirements and design possibilities. A scenario for an optimized, integrated Minienvironment and SMIF-based Automated facility is described and the benefits are analyzed. Recent data is presented comparing particulate contamination within various conventional open and minienvironment-based facilities worldwide.

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International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM

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