金/锡冶金无熔剂倒装片连接技术

C. Kallmayer, D. Lin, J. Kloeser, H. Oppermann, E. Zakel, H. Reichl
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引用次数: 15

摘要

使用Au/Sn体系作为钎料冶金,可以实现不同的无熔剂倒装工艺。在本文的研究中,采用Au/Sn碰撞芯片在活化气氛下的红外烘箱中进行自对准焊接。金/锡合金在气相焊接中的成功应用为自对准焊接提供了新的途径。还演示了使用脉冲加热热模在刚性和柔性基板上的倒装芯片键合。本文的范围是展示在薄膜和厚膜衬底上采用金/锡冶金的不同无熔剂倒装工艺的发展。衬垫的润湿、圆角的形成和/spl zeta/-相的生长是研究的主要内容,因为它们决定了键合的结果。进行剪切试验是为了量化互连的质量。对不同方法得到的结果进行了比较,并得出了研究过程的结论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fluxless flip-chip attachment techniques using the Au/Sn metallurgy
With the use of the Au/Sn system as solder metallurgy different fluxless flip-chip processes are possible. In the studies for this paper Au/Sn bumped chips are used for soldering in an infrared oven under activated atmosphere with the self-alignment mechanism. A new approach is the successful application of the Au/Sn metallurgy for vapor phase soldering which provides the self-alignment effect as well. Flip-chip bonding on rigid and flexible substrates using a pulse heated thermode is also demonstrated. The scope of this paper is to show the development of different fluxless flip-chip processes with Au/Sn metallurgy on thin film and thick film substrates. The wetting of the pads, the fillet formation and the growth of /spl zeta/-phase are the major subjects of the studies as they determine the bonding result. Shear tests were performed in order to quantify the quality of the interconnection. The results obtained by the different methods are compared and conclusions about the investigated processes drawn.
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