利用晶圆融合超晶格势垒改善InGaAsP/InP MQW有源区的发光

K. A. Black, P. Abraham, A. Karim, J. Bowers, E. Hu
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引用次数: 20

摘要

研究了InP/InGaAsP多量子阱(MQW)激光有源区的发光特性。在熔合前、熔合后、热循环后和快速热退火后对掺杂和未掺杂的活性区进行了室温光致发光研究。结果表明,晶圆融合后量子阱的发光强度明显降低。在MQW有源区的融合表面引入超晶格缺陷阻挡层,不仅防止了发光性能的退化,而且通过融合过程将MQW有源区的发光性能提高了4倍。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improved luminescence from InGaAsP/InP MQW active regions using a wafer fused superlattice barrier
This paper investigates the luminescence properties of InP/InGaAsP multiple quantum well (MQW) laser active regions. Room temperature photoluminescence studies were performed on doped and undoped active regions before fusion, after fusion, after thermal cycling, and after rapid thermal annealing. It is shown that quantum well luminescence intensity degrades considerably after wafer fusion. The introduction of a superlattice defect blocking layer at the fusing surface of the MQW active region not only prevents degradation of the luminescence, but actually improves the luminescence of the MQW active region through the fusion process by a factor of four.
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