用于制造高带宽电子光子集成电路的BiCMOS硅光子学平台

2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF) Pub Date : 2016-04-04 DOI:10.1109/SIRF.2016.7445464

D. Knoll, S. Lischke, A. Awny, M. Kroh, E. Krune, C. Mai, A. Peczek, D. Petousi, S. Simon, K. Voigt, G. Winzer, L. Zimmermann

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引用次数: 18

摘要

光子BiCMOS是一种制造电子-光子集成电路的新技术。宽带硅光子器件如锗光电二极管和耗尽型马赫-曾德尔调制器在高性能SiGe BiCMOS基线工艺中进行了单片集成。将回顾演示电路的集成方面和示例。

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BiCMOS silicon photonics platform for fabrication of high-bandwidth electronic-photonic integrated circuits

Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and examples of demonstrator circuits shall be reviewed.

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来源期刊

2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)

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