Integrated microwave filters in MCM-D

Thin film multilayer Multichip Module technology (MCM-D) may be used to realise microwave circuits such as capacitors and inductors. These may be combined to form passive filter structures. Such filters are an essential element of microwave circuits. On monolithic microwave integrated circuits, these structures require a large area resulting in a high cost. In this paper we present microwave filters integrated in multilayer MCM-D technology. As MCM-D also provides the interconnect between the individual microwave components, an integrated microwave Junction is realised, reducing the global system cost. The inductive and capacitive elements that are used to realise the filters are presented. The design of a low pass and a band pass filter using these elements is discussed. Finally, measurements of realised filters are presented.