一种表面微机械谐振光束压力传感器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906473

P. Melvås, E. Kalvesten, G. Stemme

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引用次数: 12

摘要

提出了首个全表面微机械谐振梁压力传感器。采用全表面微机械加工工艺，制备了具有100/spl倍/150/spl倍/2 /spl μ m压敏膜片的封装光束谐振压力传感器。谐振光束完全封闭在膜片下方形成的参考真空腔内。新设计实现了高压力灵敏度和微型芯片尺寸，这对于导管式血管内血压传感器等传感器至关重要。测得压力灵敏度为3.2%/bar，波束谐振频率约为700 kHz。

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A surface micromachined resonant beam pressure sensor

The first entirely surface micromachined resonant beam pressure sensor is presented. Using a fully surface micromachined process an encapsulated beam resonant pressure sensor with a pressure sensitive diaphragm of 100/spl times/150/spl times/2 /spl mu/m has been fabricated. The resonating beam is fully enclosed inside the reference vacuum cavity formed beneath the diaphragm. The new design enables high pressure sensitivity and a miniature chip size, essential for sensors such as catheter mounted intravascular blood pressure sensors. The pressure sensitivity is measured to 3.2%/bar with a beam resonance frequency at about 700 kHz.

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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