系统感知DUT设计,优化晶圆上噪声测量

Chih-Hung Chen, Benson Yang, Pei-Hsien Chu, Graham Brown, Saswati Das
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引用次数: 1

摘要

本文提出了一种系统感知的被测设备(DUT)设计,用于最佳的高频(HF)晶圆上噪声测量。它克服了由于大型被测设备输出端口互连中的电压降而导致的噪声源的偏置和几何依赖性建模的挑战。它还可以防止由于小被测件噪声不足而导致的测量不准确。给出了不同技术的实验数据和建议的器件尺寸。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
System aware DUT design for optimum on-wafer noise measurement
This paper presents a system-aware design of device-under-tests (DUT) for optimum high-frequency (HF) on-wafer noise measurement. It overcomes the challenges in modeling the bias and geometry dependence of noise sources due to the voltage drop in the interconnections at the output port of a large DUT. It also prevents the measurement inaccuracy resulted from insufficient noise from a small DUT. Experimental data and suggested device sizes for different technologies are presented.
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