{"title":"三维光学激光光刻技术:最新进展","authors":"M. Wegener","doi":"10.1364/ISA.2016.IM4F.1","DOIUrl":null,"url":null,"abstract":"We review some of our recent progress on three-dimensional multi-photon optical laser lithography. This includes STED-like approaches for improving the spatial resolution as well as examples for novel metamaterials made along these lines. Article not available.","PeriodicalId":263258,"journal":{"name":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","volume":"442 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"3D Optical Laser Lithography: Recent Progress\",\"authors\":\"M. Wegener\",\"doi\":\"10.1364/ISA.2016.IM4F.1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We review some of our recent progress on three-dimensional multi-photon optical laser lithography. This includes STED-like approaches for improving the spatial resolution as well as examples for novel metamaterials made along these lines. Article not available.\",\"PeriodicalId\":263258,\"journal\":{\"name\":\"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen\",\"volume\":\"442 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-07-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/ISA.2016.IM4F.1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Rundbrief Der Gi-fachgruppe 5.10 Informationssystem-architekturen","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/ISA.2016.IM4F.1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We review some of our recent progress on three-dimensional multi-photon optical laser lithography. This includes STED-like approaches for improving the spatial resolution as well as examples for novel metamaterials made along these lines. Article not available.
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