与Ge pin二极管集成的等离子体波导和检测结构

2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM) Pub Date : 2014-06-02 DOI:10.1109/ISTDM.2014.6874648

I. Fischer, L. Augel, D. Ray, J. Schulze

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引用次数: 0

摘要

我们展示了等离子体结构与Ge pin二极管的集成。我们展示了传输线结构的结果，其中spp通过光栅被光学激发，耦合到金属-绝缘体-金属槽波导结构中，并被引导到Ge pin二极管的有源区域进行电检测。

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Plasmonic waveguiding and detection structures integrated with Ge PIN-diodes

We demonstrate integration of plasmonic structures with Ge PIN-diodes. We present results on transmission line structures where SPPs are excited optically by means of a grating, coupled into a metal-insulator-metal slot waveguide structure and guided towards the active region of a Ge PIN-diode for electrical detection.

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2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM)

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