基于多导层的Love波甲苯传感器

2017 Spanish Conference on Electron Devices (CDE) Pub Date : 2017-02-01 DOI:10.1109/CDE.2017.7905219

D. Matatagui, M. Fernández, J. Fontecha, J.P. Santos, I. Sayago, M. C. Horrillo, I. Gràcia, J. Lozano

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引用次数: 1

摘要

研制了一种基于多导向层、二氧化硅层和氧化铟锡纳米颗粒层的新型Love-wave传感器。ITO纳米颗粒同时起到引导层和敏感层的作用。ITO纳米颗粒与甲苯分子之间的相互作用产生了纳米颗粒弹性特性的变化，从而使传感器在每个甲苯浓度下遭受成比例的频移。洛夫波多导层传感器检测到的甲苯浓度低至1ppm。

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Love wave toluene sensor based on multi-guiding layers

A novel Love-wave sensor based on multi-guiding layers, SiO2 layer and indium tin oxide (ITO) nanoparticle layer, was developed. The ITO nanoparticles worked as guiding and sensitive layers at the same time. The interaction between ITO nanoparticles and toluene molecules produced changes in elastic properties of nanoparticles and consequently the sensor suffered a proportional frequency shift for each toluene concentration. The Love wave multi-guiding layer sensor detected concentrations as low as 1 ppm of toluene.

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2017 Spanish Conference on Electron Devices (CDE)

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