硅基共面毫米波谐振器

IEEE 1993 Microwave and Millimeter-Wave Monolithic Circuits Symposium Digest of Papers Pub Date : 1993-06-14 DOI:10.1109/MCS.1993.247477

S. Sattler, T. Felgentreff, P. Russer

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引用次数: 0

摘要

讨论了在硅衬底上采用全共面技术构建的共面波导谐振器。对输入阻抗进行了实验和数值研究。利用空间域全波分析方法对被动平面结构进行了广泛的研究。谐振腔由共面传输线通过电容隙馈电，在共面波导基模处显示出明显的谐振。计算和测量数据一致大于5%

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A coplanar millimeterwave resonator on silicon

A coplanar waveguide (CPW) resonator built with a completely coplanar technique on a grounded silicon substrate is discussed. The input impedance is investigated experimentally and numerically. The passive planar structure is extensively studied using a space-domain full-wave analysis method. The resonator is fed by a coplanar transmission line through a capacitive gap and shows a marked resonance at the fundamental coplanar waveguide mode. Calculated and measured data agree to better than 5%.<>

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IEEE 1993 Microwave and Millimeter-Wave Monolithic Circuits Symposium Digest of Papers

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