{"title":"基于ZnO纳米针的高效紫外光电探测器","authors":"A. Ibrahim, S. Roy, S. Kale","doi":"10.56042/ijpap.v60i1.53846","DOIUrl":null,"url":null,"abstract":"This article reports the fabrication and characterization of nano-structured ITO/ZnO ultraviolet photodetector. A ZnO thin film was deposited by spray pyrolysis technique followed by interdigitated ITO as electrode deposition by RF sputter. Grazing angle x-ray diffraction (GIXRD) study indicates preferential growth along c-axis (002) of thin-film leading nanoneedle formation which was further confirmed by scanning electron microscopy (SEM) imaging. X-ray photoelectron spectroscopy (XPS) analysis of Oxygen 1s (O 1s) was carried out. A peak was observed at 531.8 eV indicating the presence of oxygen vacancy, 530 eV peak relates to the ZnO phase. The bandgap was determined by the Tauc plot; which was found to be 3.22eV. The donor carrier concentration is found to be 8.85x10 18 cm -3 based on room temperature Hall measurement. A near ohmic behaviour was observed which can be interpreted by the existence of high carrier concentration in ZnO. This results in a very thin depletion width of the order of 5nm; therefore, charge transport through the junction is dominated by tunnelling of electrons through depletion width.","PeriodicalId":209214,"journal":{"name":"Indian Journal of Pure & Applied Physics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"ZnO Nanoneedle Based Efficient UV-Photodetector\",\"authors\":\"A. Ibrahim, S. Roy, S. Kale\",\"doi\":\"10.56042/ijpap.v60i1.53846\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This article reports the fabrication and characterization of nano-structured ITO/ZnO ultraviolet photodetector. A ZnO thin film was deposited by spray pyrolysis technique followed by interdigitated ITO as electrode deposition by RF sputter. Grazing angle x-ray diffraction (GIXRD) study indicates preferential growth along c-axis (002) of thin-film leading nanoneedle formation which was further confirmed by scanning electron microscopy (SEM) imaging. X-ray photoelectron spectroscopy (XPS) analysis of Oxygen 1s (O 1s) was carried out. A peak was observed at 531.8 eV indicating the presence of oxygen vacancy, 530 eV peak relates to the ZnO phase. The bandgap was determined by the Tauc plot; which was found to be 3.22eV. The donor carrier concentration is found to be 8.85x10 18 cm -3 based on room temperature Hall measurement. A near ohmic behaviour was observed which can be interpreted by the existence of high carrier concentration in ZnO. This results in a very thin depletion width of the order of 5nm; therefore, charge transport through the junction is dominated by tunnelling of electrons through depletion width.\",\"PeriodicalId\":209214,\"journal\":{\"name\":\"Indian Journal of Pure & Applied Physics\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Indian Journal of Pure & Applied Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.56042/ijpap.v60i1.53846\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Indian Journal of Pure & Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.56042/ijpap.v60i1.53846","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
本文报道了纳米结构ITO/ZnO紫外探测器的制备与表征。采用喷雾热解法制备ZnO薄膜,然后采用射频溅射法制备交错状ITO电极。掠射角x射线衍射(GIXRD)研究表明,薄膜沿c轴(002)优先生长,导致纳米针形成,扫描电子显微镜(SEM)成像进一步证实了这一点。对氧1s (O 1s)进行了x射线光电子能谱(XPS)分析。在531.8 eV处有一个峰表示氧空位的存在,530 eV处有一个峰与ZnO相有关。带隙由Tauc图确定;结果为3.22eV。根据室温霍尔测量,供体载流子浓度为8.85x10 18 cm -3。观察到近欧姆行为,这可以解释为ZnO中存在高载流子浓度。这导致损耗宽度非常薄,约为5nm;因此,通过结的电荷输运主要是通过耗尽宽度的电子隧穿。
This article reports the fabrication and characterization of nano-structured ITO/ZnO ultraviolet photodetector. A ZnO thin film was deposited by spray pyrolysis technique followed by interdigitated ITO as electrode deposition by RF sputter. Grazing angle x-ray diffraction (GIXRD) study indicates preferential growth along c-axis (002) of thin-film leading nanoneedle formation which was further confirmed by scanning electron microscopy (SEM) imaging. X-ray photoelectron spectroscopy (XPS) analysis of Oxygen 1s (O 1s) was carried out. A peak was observed at 531.8 eV indicating the presence of oxygen vacancy, 530 eV peak relates to the ZnO phase. The bandgap was determined by the Tauc plot; which was found to be 3.22eV. The donor carrier concentration is found to be 8.85x10 18 cm -3 based on room temperature Hall measurement. A near ohmic behaviour was observed which can be interpreted by the existence of high carrier concentration in ZnO. This results in a very thin depletion width of the order of 5nm; therefore, charge transport through the junction is dominated by tunnelling of electrons through depletion width.