用于能量收集的低谐振频率微型驻极体发生器

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI:10.1109/MEMSYS.2009.4805569

M. Edamoto, Y. Suzuki, N. Kasagi, K. Kashiwagi, Y. Morizawa, T. Yokoyama, T. Seki, M. Oba

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引用次数: 61

摘要

一种振动驱动的驻极体发电机已被开发用于能量收集应用。采用聚对二甲苯作为弹簧材料，实现了低谐振频率的MEMS发生器。间隙控制采用静电悬浮。在低至21 Hz的谐振频率下，实现了0.5 mm的大面内振幅。我们还演示了使用低功耗阻抗转换电路的驻极体驱动LED的操作。

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Low-Resonant-Frequency Micro Electret Generator for Energy Harvesting Application

A vibration-driven electret generator has been developed for energy harvesting applications. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Electrostatic levitation is adopted for the gap control. Large in-plane amplitude of 0.5 mm at the resonant frequency as low as 21 Hz has been achieved. We also demonstrate electret-powered operation of LED using a low-power-consumption impedance conversion circuit.

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来源期刊

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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