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引用次数: 49
摘要
研究了用Langmuir-Blodgett技术沉积的磷化铟和有机薄膜结构的电学性质。在大约30 Hz的频率下,使用熔融生长的InP单晶和使用气相技术制备的这种材料的外延层,出现了强烈的低频反转C/V响应。利用准静态和电导技术从导纳数据中评估了界面状态分布。对于n型inp外延晶片/硬脂酸镉结,发现有效表面态密度为~3 × 1011 cm?2电动汽车?1在很大一部分带隙上。基于熔体生长晶体的结构计算的平均表面态密度大约高出一个数量级。首次报道了采用Langmuir-Blodgett薄膜的晶体管的测量结果。根据这种相对简单的耗尽模式器件的转移特性,计算出InP场效应表面迁移率为2250 cm2 V?1 s ?1
The electrical properties of m.i.s. structures based on indium phosphide and organic films deposited using the Langmuir-Blodgett technique have been investigated. A strongly inverted low-frequency C/V response occurs at approximately 30 Hz using both melt-grown InP single crystals and epitaxial layers of this material prepared using the vapour-phase technique. Interface state distributions have been evaluated from the admittance data using quasistatic and conductance techniques. For an n-type InP-epitaxial-wafer/cadmium-stearate junction the effective surface-state density is found to be ~3 × 1011 cm?2 eV?1 over a large fraction of the bandgap. Average surface-state densities calculated for structures based on melt-grown crystals were approximately one order of magnitude higher. For the first time measurements are reported for a transistor incorporating a Langmuir-Blodgett film. From the transfer characteristics of this relatively simple depletion-mode device the InP field-effect surface mobility is calculated to be 2250 cm2 V?1 s?1