基于HfOX的RRAM参数提取

Peng Huang, Bing Chen, Haitong Li, Zhe Chen, B. Gao, Xiaoyan Liu, Jinfeng Kang
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引用次数: 9

摘要

在这项工作中,开发了一种新的方法,包括提取策略和表征过程,以提取主导HfOX RRAM器件开关特性的物理参数。利用提取的参数,利用原子级仿真工具对基于HfOX的RRAM器件的保留行为进行了模拟,并与测量结果进行了比较。仿真结果与实测结果吻合,验证了所提方法的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Parameters extraction on HfOX based RRAM
In this work, a novel methodology including the extraction strategy and characterization procedure is developed to extract the physical parameters which dominate the switching characteristics of HfOX based RRAM devices. With the extracted parameters, the retention behaviors of HfOX based RRAM devices are simulated by the atom-level simulation tool and compared with the measurement. The agreement between the simulation and measurement verifies the validity of the developed methodology.
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