加速度计双面曝光及粘接技术

1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) Pub Date : 1998-10-21 DOI:10.1109/ICSICT.1998.786524

Taiping Zhang, Ting Li, Ke-Qiang Deng

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引用次数: 0

摘要

作者采用双面曝光键合和深度蚀刻技术制造加速度计和陀螺仪。该技术基于MEMS加工。介绍了传感器的测试方法。

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Technology of double side exposure and bonding for fabrication of accelerometer

The authors use double sided exposure and bonding and deep etching to fabricate accelerometers and gyroscopes. The technology is based on MEMS processing. The sensor testing is presented.

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来源期刊

1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)

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