机电继电器用静电微致动器

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77980

M. Sakata

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引用次数: 28

摘要

介绍了一种静电微型继电器的设计、制作过程和特性估计。利用静电场分析的边界元法估计了其特性(接触力和响应时间)。对样机的未来发展、微致动器技术及其应用前景等问题进行了展望

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An electrostatic microactuator for electro-mechanical relay

The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered.<>

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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