VLSI缺陷/故障分析中缺陷尺寸分布的参数敏感性估计

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Pub Date : 2002-08-07 DOI:10.1109/MIEL.2002.1003317

M. Blyzniuk, I. Kazymyra

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摘要

对超大规模集成电路缺陷/故障分析中缺陷尺寸分布的参数敏感性进行了评价。考虑使用专用软件FIESTA进行计算实验，以估计近似实际缺陷分布的表达式中参数的显著性。分析了所得到的实验结果及其实用性。

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Estimation of parametric sensitivity for defects size distribution in VLSI defect/fault analysis

The parametric sensitivity of defect size distribution in VLSI defect/fault analysis is evaluated. The use of special software tool FIESTA for the computational experiment aimed at estimation of the significance of parameters in expressions approximating the actual defect distribution is considered. The obtained experimental results and their usefulness have been analysed.

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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)

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