C. Jeong, Sanghoon Myung, Byungseon Choi, Jinwoo Kim, Wonik Jang, I. Huh, Jae Myung Choe, Young-Gu Kim, Dae Sin Kim
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Deep Learning for Semiconductor Materials and Devices Design
This paper provides two examples of use cases of deep learning (DL) in the fabrication and design of modern semiconductor devices: modeling of plasma dry-etching process and transistor performance. The use cases demonstrate an improved version of DL model in terms of model accuracy and prediction time by incorporating scientific knowledge into DL.
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