设计一种新型高性能三轴MEMS电容式加速度计

H. Tavakoli, H. G. Momen, E. Sani
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引用次数: 7

摘要

提出了一种新型三轴MEMS电容式加速度计。采用单样块检测三个方向的加速度,各轴加速度可独立测量。采用全新的全对称结构,采用电容式换能法在验证质量上测量平面内外方向,从而实现高可靠性、低温度敏感性、低漂移和功率加速度计。因此,它与CMOS技术更兼容。新的梳状驱动结构彻底消除了电极的跨轴灵敏度。因此,它适用于多轴加速度检测系统。总传感面积为1.58 mm2,证明质量重量为12.1µgr,各方向可检测加速度为1 g。在X、Y方向上的加速度测量范围为±100g,在Z方向上的加速度测量范围为±30g,并提出了表面微加工的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Designing a new high performance 3-axis MEMS capacitive accelerometer
A new configured 3-axis MEMS capacitive accelerometer is presented in this paper. Single proof mass is employed to detect acceleration in three directions and acceleration could be measured in each axis independently. The new fully symmetrical configuration of the structure enables it to measure in plane and out plane directions by employing capacitive transduction method on a proof mass which leads to high reliable, less temperature sensitive, low drift and power accelerometer. So, it is more compatible with CMOS technology. The new comb drive configuration of electrodes eliminate the cross-axis sensitivity thoroughly. Thus, it is suitable for multi axis acceleration detection systems. The total sensing area, proof mass weight and detectable acceleration in all directions are 1.58 mm2, 12.1 µgr and 1 g, respectively. The acceleration measuring range in in plane direction (X and Y) is ±100 g and for out plane direction (Z) is ±30 g and surface micromachining method is proposed for fabrication process.
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