液体介质中生物传感用压电驱动硅膜的高质量因子及检测方案

2006 IEEE International Frequency Control Symposium and Exposition Pub Date : 2006-06-01 DOI:10.1109/FREQ.2006.275363

C. Ayela, T. Leichlé, C. Bergaud, L. Nicu, É. Cattan, C. Soyer, M. Pugnière

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引用次数: 1

摘要

本文从绝缘体上硅(SOI)晶圆开始，采用标准微加工技术制备了4 × 4矩阵的压电膜。每个膜(圆形)可以通过PbZr(x)Ti(1-x)O3 (PZT) 800纳米厚的薄膜单独定位用于驱动和传感应用。本文的主要目的是研究压电膜在空气和液体介质中的动态行为。结果表明，在空气中(高达150)和水-甘油中(甘油在水中的比例低于30%时降低4倍)，共振频率显著降低，而液体明显的附加质量效应

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High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media

The paper is about 4 times 4 matrices of piezoelectric membranes that were fabricated by standard micromachining techniques starting with silicon-on-insulator (SOI) wafer. Each membrane (circular shaped) can be individually addressed for actuation and sensing applications through a PbZr(x)Ti(1-x)O3 (PZT) 800-nm thick film. The main objective of this work is to study the dynamic behavior of the piezoelectric membranes in air and liquid media. The results showed high quality factors in air (up to 150) and in water-glycerol (lowered by a factor 4 for a glycerol proportion in water less than 30%) while the resonant frequencies were significantly decreased by the liquid apparent added mass effects

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2006 IEEE International Frequency Control Symposium and Exposition

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