硅伞结构的大位移塑性变形过程

T. Aono, Y. Ebata, S. Matsui, T. Watanabe
{"title":"硅伞结构的大位移塑性变形过程","authors":"T. Aono, Y. Ebata, S. Matsui, T. Watanabe","doi":"10.1109/TRANSDUCERS.2013.6626946","DOIUrl":null,"url":null,"abstract":"A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"202 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Large displacement plastic deformation process for silicon parasol structure\",\"authors\":\"T. Aono, Y. Ebata, S. Matsui, T. Watanabe\",\"doi\":\"10.1109/TRANSDUCERS.2013.6626946\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.\",\"PeriodicalId\":202479,\"journal\":{\"name\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"volume\":\"202 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2013.6626946\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2013.6626946","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

采用开发的两步硅塑性变形工艺,实现了大位移硅遮阳伞结构。这一过程包括三个关键过程:第一,高温下的塑性变形和从一侧施加载荷;二是大位移时的两步塑性变形,三是塑性变形后的冠层释放。据此,利用所开发的塑性变形工艺可制备直径为30 mm、曲率半径为100 mm的硅遮阳伞结构。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Large displacement plastic deformation process for silicon parasol structure
A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信