{"title":"硅伞结构的大位移塑性变形过程","authors":"T. Aono, Y. Ebata, S. Matsui, T. Watanabe","doi":"10.1109/TRANSDUCERS.2013.6626946","DOIUrl":null,"url":null,"abstract":"A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"202 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Large displacement plastic deformation process for silicon parasol structure\",\"authors\":\"T. Aono, Y. Ebata, S. Matsui, T. Watanabe\",\"doi\":\"10.1109/TRANSDUCERS.2013.6626946\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.\",\"PeriodicalId\":202479,\"journal\":{\"name\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"volume\":\"202 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2013.6626946\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2013.6626946","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Large displacement plastic deformation process for silicon parasol structure
A large displacement silicon parasol structure has been realized using a developed two-step silicon plastic deformation process. This process consists of three key processes: first, plastic deformation at high temperature and applying a load from one side; second, two-step plastic deformation for large displacement and third, canopy release after plastic deformation. Accordingly, the silicon parasol structure with a diameter of 30 mm and a curvature radius of 100 mm can be fabricated by the developed plastic deformation process.