原子分辨率存储装置用带聚焦柱的场发射器

A. Govyadinov, J. Smith, B. Mackie, F. Charbonier, P. Benning
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摘要

本文讨论了用于原子分辨率存储的可聚焦电子发射器的设计、研制和制造。该系统设计包括一个带有集成聚焦柱的电子源,并且必须在最佳条件下提供最小光斑尺寸和最大效率。加工零件的实验结果与模型预测的光斑尺寸吻合较好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field emitter with focusing column for atomic resolution storage device
This paper discussed the design and development and fabrication of a focusable electron emitter for atomic resolution storage. The system design includes an electron source with an integrated focusing column and must provide a minimum spot size and maximum efficiency under optimum conditions. Experimental results from the fabricated parts compared well with model spot size predictions.
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