晶圆厂集成封装(FIP):高可靠性晶圆级芯片尺寸封装的新概念

M. Topper, J. Auersperg, V. Glaw, K. Kaskoun, E. Prack, B. Keser, P. Coskina, D. Jáger, D. Fetter, O. Ehrmann, K. Samulewicz, C. Meinherz, S. Fehlberg, C. Karduck, H. Reichl
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引用次数: 36

摘要

晶圆级封装在未来的单芯片封装中具有最大的潜力。封装直接在晶圆上完成,然后以倒装芯片的方式为组装进行切割。所有模拟骰子的封装和测试操作将被整片制造和晶圆级测试所取代。其结果是一项引领Fab集成封装(FIP)的技术。在Fraunhofer IZM和摩托罗拉的联合开发项目FIP中,对新型晶圆级芯片规模封装(WL-CSP)的可靠性进行了评估。作为CSP, FIP-CSP在使用高通量SMT装配线的倒装芯片键合过程中消除了下填充操作。该FIP-CSP的工艺结构是带有焊球阵列的焊盘再分布芯片。应力补偿层(SCL)在第二焊料球被模板印刷或放置在嵌入球的顶部之前嵌入焊料球。本文提出的晶圆级CSP的可靠性进行了模拟和测试样品评估。测试芯片为1 cm/spl × 1 cm的方形芯片,将其重新分布到间距为0.5 mm的14/spl × 14球阵列中。JEDEC 3级,1000循环AATC (-55/spl℃/+125/spl℃/C)和48小时的组件级高压灭菌。在85/85度/C条件下,通过了1000小时的船上水平湿度存储(85/85测试)和1000次循环-55/+125/spl度/C。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fab Integrated Packaging (FIP): a new concept for high reliability wafer-level chip size packaging
Wafer Level Packaging has the highest potential for future single chip packages. The package is completed directly on the wafer then singulated by dicing for the assembly in a flip chip fashion. All packaging and testing operations of simulated dice will be replaced by whole wafer fabrication and wafer level testing. The result is a technology which leads the way to Fab Integrated Packaging (FIP). An evaluation of the reliability of a new Wafer-Level Chip Scale Package (WL-CSP) was done in the FIP program, a joint development program between Fraunhofer IZM and Motorola. As a CSP the FIP-CSP eliminates underfill operation during flip-chip bonding using high through-put SMT assembly lines. The technological structure of this FIP-CSP is a pad redistributed die with a solder ball array. A stress compensation layer (SCL) embeds the solder balls before second solder balls are stencil printed or placed on top of embedded balls. The reliability of this wafer-level CSP presented here was simulated and evaluated by test samples. The test chip was a 1 cm/spl times/1 cm square chip which was redistributed to an 14/spl times/14 ball array with a pitch of 0.5 mm. JEDEC Level 3, 1000 cycles AATC (-55/spl deg/C/+125/spl deg/C) and 48 h Autoclave on component level were passed. On board level 1000 hours humidity storage at 85/spl deg/C (85/85 test) and 1000 cycles -55/+125/spl deg/C were passed.
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