New Generation of On-Wafer Microwave Probe Station for Precision GSG Probing

Accurate characterization of emergent RF extreme impedance micro-and nanoelectronic devices requires novel probing techniques to ensure the probe-to-pad contact repeatability. In this effort, a new generation of nanorobotics on-wafer probing station is developed. Residual calibration error terms related to probe-to-device approach / retract are quantified in the frequency range 50 MHz – 50 GHz. These residual error terms are propagated to determine the overall measurement uncertainty on the determination of extreme complex impedances. In particular, preliminary results considering capacitance value of 1 fF at 10 GHz demonstrate error around 17% versus 80% using a conventional probe station.