在Si(111)表面生长高质量GaN纳米壁

S. Shetty, S. M. Shivaprasad
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引用次数: 1

摘要

在本文中,我们提出了在PA-MBE生长过程中,在2、4.5和6sccm不同的氮通量下,在Si(111)表面形成GaN纳米壁形态。研究了这些薄膜的光学、结构和电学性能。阴极发光数据表明,生长在6sccm的纳米壁网络具有高光发射和高晶体质量。GaN膜的电流-电压(I-V)特性在1V时表现出不同的整流行为,在2、4.5和6 sccm生长的GaN层的正向和反向电流比分别为39、155和388,而这些结的反向泄漏电流值分别为1.2×10-3、2.6×10-4和9×10-6 A。观察到的良好的光学和电学性能表明,在6sccm氮流下生长的GaN/Si异质结具有低缺陷密度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth of high quality GaN nanowalls on Si (111) surface
In this article, we propose the formation of GaN nanowall morphology on Si (111) surface by varying nitrogen flux from 2, 4.5 and 6sccm in PA-MBE growth. The optical, structural and electrical properties of these films are investigated. Cathodo-luminescence data suggests that the nanowall network grown at 6sccm show high optical emission and high crystalline quality. The current-voltage (I-V) characteristics of the GaN films exhibit varying rectifying behavior at 1V with forward to reverse current ratios of 39, 155, 388 for the GaN layers grown at 2, 4.5 and 6 sccm while the reverse leakage current values are 1.2×10-3, 2.6×10-4 and 9×10-6 A respectively for these junctions. The good optical and electrical properties observed suggest that GaN/Si heterojunction grown at 6sccm nitrogen flow comprise of low defect density.
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