Ben A. Schmid, J. Jia, J. Wolfman, Yu Wang, F. Dhaoui, Huan-Chung Tseng, Sung-Rae Kim, Kin-Sing Lee, Patty Liu, K. Han, C. Hu
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Cycling induced degradation of a 65nm FPGA flash memory switch
We present a study of cycling induced degradation of a two transistor Flash memory cell with a shared floating gate. The cell directly serves as a configurable interconnection switch in a Field Programmable Gate Array (FPGA) fabricated with a 65 nm embedded-Flash process. By optimizing the poly re-oxidation, LDD implant and spacer module, the cell endurance is significantly improved at both the single cell and 1 Mbit test-array levels.