MEMS accelerometers testing using a laser feedback interferometer

This paper proposes a new method for the testing of accelerometers by using a laser feedback interferometer (LFI). In this method, a portion of light from a laser diode is reflected by an external target and then returns back to the laser cavity, laser feedback interference occurs. Depending on various vibration frequencies, fringe counting method or minimum point method is introduced into the interference signal analysis of LFI to determine the sensitivity of accelerometers. Theoretical analysis and experimental results are given. The proposed system is applicable to test accelerometers in industrial applications with a low-cost and simple mechanical structure.