扫描透射电子显微镜差相衬成像技术的缺陷表征

2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2019-07-01 DOI:10.1109/IPFA47161.2019.8984823

Ching-Chun Lin, Kim Hsu

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引用次数: 0

摘要

提出了一种在扫描透射电子显微镜(STEM)下，利用差分相衬(DPC)图像和分段式检测器检测沿特定方向延伸的晶体缺陷的新方法。此外，还可以对来自不同节段的信号进行进一步处理，有针对性地增强光元素的对比度，这也称为分段环空全场(SAAF)系统中的增强环空亮场(eABF)模式。

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Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope

A novel approach to detect the crystal defects extended along particular orientation using differential phase contrast (DPC) images with segmented type detector for wide range of devices and materials in scanning transmission electron microscope (STEM) is provided. In addition, the signals from different segments could be further processed to enhance the contrast of light elements specifically, which also called enhanced annular bright field (eABF) mode in segmented annular all field (SAAF) system.

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来源期刊

2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)

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