一种过程容差自补偿感测放大器设计

A. Choudhary, S. Kundu
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引用次数: 14

摘要

光刻相关的CD变化、掺杂剂密度的波动、氧化物厚度和器件参数变化被认为是ITRS的主要挑战。由于嵌入式sram尺寸的增长以及基于信号技术的感测放大器的使用,感测放大器的工艺变化导致产量的显著损失。本文提出了一种采用有源补偿电路的过程变化容忍自补偿感测放大器的设计。在32nm制程中的统计模拟结果表明,所提出的主动补偿在没有显著制程变化的情况下,可以非常有效地将良率恢复到与感测放大器相当的水平。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Process Variation Tolerant Self-Compensating Sense Amplifier Design
Lithography related CD variations, fluctuations in dopant density, oxide thickness and parametric variations of devices are identified as major challenges in ITRS. Due to growth in size of embedded SRAMs as well as usage of sense amplifier based signaling techniques, process variation in sense amplifiers lead to significant loss of yield. In this paper, we present a process variation tolerant self-compensating sense amplifier design, using an active compensation circuitry. Results from statistical simulation in a 32nm process show that the proposed active compensation is highly effective in restoring yield at a level comparable to that of sense amplifiers without significant process variations.
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