{"title":"精确的系统校准和数据提取指南，以增加光谱光子发射显微镜测量的意义","authors":"N. Herfurth, C. Boit","doi":"10.31399/asm.edfa.2022-4.p004","DOIUrl":null,"url":null,"abstract":"\n This article presents and evaluates a calibration method that significantly improves the spectral information that can be extracted from photon emission signals obtained from semiconductor devices. Step-by-step instructions are given for calibrating photon emission microscopes for specific measurements such as device parameters and material band gap. The article also discusses the types of errors that can occur during calibration. Although the procedure presented is used on InGaAs sensors, it applies to all common photon emission detectors.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Guide to Accurate System Calibration and Data Extraction to Increase Significance of Spectral Photon Emission Microscopy Measurements\",\"authors\":\"N. Herfurth, C. Boit\",\"doi\":\"10.31399/asm.edfa.2022-4.p004\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n This article presents and evaluates a calibration method that significantly improves the spectral information that can be extracted from photon emission signals obtained from semiconductor devices. Step-by-step instructions are given for calibrating photon emission microscopes for specific measurements such as device parameters and material band gap. The article also discusses the types of errors that can occur during calibration. Although the procedure presented is used on InGaAs sensors, it applies to all common photon emission detectors.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2022-4.p004\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2022-4.p004","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Guide to Accurate System Calibration and Data Extraction to Increase Significance of Spectral Photon Emission Microscopy Measurements
This article presents and evaluates a calibration method that significantly improves the spectral information that can be extracted from photon emission signals obtained from semiconductor devices. Step-by-step instructions are given for calibrating photon emission microscopes for specific measurements such as device parameters and material band gap. The article also discusses the types of errors that can occur during calibration. Although the procedure presented is used on InGaAs sensors, it applies to all common photon emission detectors.
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