微放电准分子灯用纳秒脉冲发生器

M. Moselhy, K. Schoenbach
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引用次数: 6

摘要

只要脉冲持续时间与放电等离子体中电子的弛豫时间相当或小于,脉冲电子加热引起电子温度的升高,而气体加热可以忽略不计。对于大气压等离子体,这是几十纳秒。由于微空心阴极放电的持续电压仅为200v,高达1kv的脉冲电压足以显著提高等离子体中的电子温度。在Blumlein配置中,利用MOSFET作为开关和脉冲形成网络(PFN)的组合提供了FWHM低至10 ns的脉冲,上升和下降时间为4 ns。将这些短脉冲应用于直流微空心阴极放电导致准分子发射的显著增加,并且,对于氙放电,在准分子效率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nanosecond pulse generators for microdischarge excimer lamps
Pulsed electron heating causes an increase in electron temperature with negligible gas heating, as long as the pulse duration is comparable to or less than the relaxation time of the electrons in the discharge plasma. For atmospheric pressure plasmas this is tens of ns. Since the sustaining voltage of microhollow cathode discharges is only 200 V, pulsed voltages of up to 1 kV are sufficient to increase the electron temperature in these plasmas considerably. A combination utilizing a MOSFET as a switch with a pulse forming network (PFN) in a Blumlein configuration has provided pulses with FWHM down to 10 ns, and rise and fall times of 4 ns. Applying these short pulses to DC microhollow cathode discharges resulted in significant increases in excimer emission, and, for xenon discharges, in excimer efficiency.
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