用于无线通信的MEMS和NEMS技术

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Pub Date : 2002-08-07 DOI:10.1109/MIEL.2002.1003153

D. Dubuc, K. Grenier, L. Rabbia, A. Tackac, M. Saadaoui, P. Pons, P. Caudrillier, O. Pascal, H. Aubert, H. Baudrand, J. Tao, P. Combes, J. Graffeuil, R. Plana

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引用次数: 5

摘要

本文提出了一种基于MEMS和NEMS(纳米机电系统)概念的新型元件系列。它们在未来的无线通信系统中显示出非常有吸引力的特性。这些元件的设计包括电磁模拟和机械和热建模，以便准确描述它们的电气行为。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS and NEMS technologies for wireless communications

This paper presents a new family of components based on the MEMS and NEMS (nano-electromechanical system) concepts. They show very attractive properties for future wireless communications systems. The design of such components involves both electromagnetic simulations and mechanical and thermal modelling in order to get an accurate description of their electrical behavior.

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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)

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