产量可靠性模型:实验验证及在减少磨损上的应用

T. S. Barnett, A. Singh, M. Grady, Kathleen G. Purdy
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引用次数: 24

摘要

利用IBM微电子公司生产的77,000个微处理器单元的老化数据,验证了集成的产量可靠性模型。该模型是基于半导体晶圆上的缺陷不是随机分布的,而是有聚集的趋势。结果表明,这一事实可以被利用来生产不同可靠性的模具,方法是根据其邻居测试错误的数量将模具分类到容器中。在晶圆探针测试中表现良好但产自缺陷多的地区的婴儿死亡率高于产自缺陷少的地区的婴儿死亡率。产量可靠性模型用于预测晶圆探测后每个桶中好模具的比例,以及压力测试后每个桶中失败的比例(例如老化)。结果表明,模型预测与观测数据非常吻合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Yield-reliability modeling: experimental verification and application to burn-in reduction
An integrated yield-reliability model is verified using burn-in data from 77,000 microprocessor units manufactured by IBM Microelectronics. The model is based on the fact that defects over semiconductor wafers are not randomly distributed, but have a tendency to cluster. It is shown that this fact can be exploited to produce die of varying reliability by sorting die into bins based on how many of their neighbors test faulty. Die that test good at wafer probe, yet come from regions with many faulty die, have a higher incidence of infant mortality failure than die from regions with few faulty die. The yield-reliability model is used to predict the fraction of good die in each bin following wafer probing as well as the fraction of failures in each bin following stress testing (e.g. burn-in). Results show excellent agreement between model predictions and observed data.
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