新AFM成像的高纵横结构:STI和接触孔

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984181

T. Morimoto, H. Kuroda, Y. Minomoto, Y. Nagano, Y. Kembo, S. Hosaka

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引用次数: 0

摘要

一种新的原子力显微镜成像技术(步进模式)被开发出来，以消除在恒定间隙控制下xy扫描对探针造成的摩擦或扭转。实验结果表明，该方法采用高展弦比探头，能较好地观察STI结构，损伤小。我们得出结论，本文提出的步进模式对STI结构的在线评估是有用的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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New AFM imaging for high aspect structures: STI and contact holes

New AFM imaging technique (step-in mode) has been developed to remove the friction or torsion against the probe caused by xy scanning under the constant gap control. As experimental results show, this method can observe STI structure faithfully by high aspect ratio probe with less damage. We conclude that the step-in mode proposed in this paper is useful for in-line evaluation of STI structure.

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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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