K. Mersereau, C. Nijander, W. Townsend, A. Feldblum
{"title":"熔融石英微透镜阵列的制备","authors":"K. Mersereau, C. Nijander, W. Townsend, A. Feldblum","doi":"10.1109/SARNOF.1993.657948","DOIUrl":null,"url":null,"abstract":"Microlenses and microlens arrays can be applied to optical power transfer problems such as coupling light from a laser into a fiber, improving the sensitivity of detector arrays, and free-space optical interconnect. We report fabrication of diffraction-limited refractive microlens arrays in fused silica (SiO,) with diameters ranging from 1Op.m to 400p.m and f-numbers of F/1.5 to F/5. Our microlenses are made by melting photoresist into lens shapes and etching these into the SiO, substrate using reactive ion etching.","PeriodicalId":355387,"journal":{"name":"1993 IEEE Princeton Section Sarnoff Symposium","volume":"64 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fabrication of fused silica microlens arrays\",\"authors\":\"K. Mersereau, C. Nijander, W. Townsend, A. Feldblum\",\"doi\":\"10.1109/SARNOF.1993.657948\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Microlenses and microlens arrays can be applied to optical power transfer problems such as coupling light from a laser into a fiber, improving the sensitivity of detector arrays, and free-space optical interconnect. We report fabrication of diffraction-limited refractive microlens arrays in fused silica (SiO,) with diameters ranging from 1Op.m to 400p.m and f-numbers of F/1.5 to F/5. Our microlenses are made by melting photoresist into lens shapes and etching these into the SiO, substrate using reactive ion etching.\",\"PeriodicalId\":355387,\"journal\":{\"name\":\"1993 IEEE Princeton Section Sarnoff Symposium\",\"volume\":\"64 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-03-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1993 IEEE Princeton Section Sarnoff Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SARNOF.1993.657948\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1993 IEEE Princeton Section Sarnoff Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SARNOF.1993.657948","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microlenses and microlens arrays can be applied to optical power transfer problems such as coupling light from a laser into a fiber, improving the sensitivity of detector arrays, and free-space optical interconnect. We report fabrication of diffraction-limited refractive microlens arrays in fused silica (SiO,) with diameters ranging from 1Op.m to 400p.m and f-numbers of F/1.5 to F/5. Our microlenses are made by melting photoresist into lens shapes and etching these into the SiO, substrate using reactive ion etching.
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