大功率封装氮化硅钝化层环氧成型材料的热力学特性及应力模拟

Zhiwen Li, April Joy H. Garete, Zhou Zhou, H. Fan, Elmer Holgado, Ibarra Licup
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引用次数: 1

摘要

本文研究了高功率表面贴装器件温度循环过程中环氧成型复合热机械材料性能对模具顶部氮化硅钝化应力的影响。通过材料表征、组装和分层性能、热机械应力模拟、可靠性测试和TCT后钝化层完整性检查,成功研究了采用不同先进EMCs实现高功率SMD的SiN钝化层的电磁兼容性(Tg、CTE和模量)。在此基础上,提出了与模具复合性能相关的应力消除机制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermo-mechanical Characterization and Stress Simulation of Epoxy Molding Compound for a High-Power Package with Silicon Nitride Passivation Layer
In this paper, the influence of epoxy molding compound thermomechanical material properties on die top silicon nitride passivation stress during temperature cycling on a high-power surface mount device was studied. The combination of EMC properties (Tg, CTE, and modulus) using different advanced EMCs to achieve lower tensile stress on SiN passivation layer for a high-power SMD was successfully investigated through material characterization, assembly and delamination performance, thermo-mechanical stress simulation, reliability testing, and passivation layer integrity check after TCT. Furthermore, stress relief mechanism related to the mold compound property was proposed based on the results of the study.
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