细间距衬垫上的拉丝:一种过时的第一键完整性测试

V. Sundararaman, D. Edwards, W.E. Subido, H.R. Test
{"title":"细间距衬垫上的拉丝:一种过时的第一键完整性测试","authors":"V. Sundararaman, D. Edwards, W.E. Subido, H.R. Test","doi":"10.1109/ECTC.2000.853187","DOIUrl":null,"url":null,"abstract":"This work focuses on the validity and applicability of the wire pull test being used as a measure of first bond integrity of wire bonds on fine pitch pads used in advanced silicon technology devices. The effect of geometry of the wire bond is studied by considering variations in the angle of force application during the wire pull test and the presence of nonintermetallic region (de-bonds) created by a probe mark under the ball. This paper does not address the effects of the silicon-level interconnect structure underneath the bond-pads, i.e., it is assumed that the underlying structure is defect-free, and the layers of interconnect metal and interlayer dielectric (ILD) are modeled along with the silicon as a smeared homogeneous material. Experimental data that corroborate the findings from the finite element analyses are also presented. Results from this work indicate that if the wire pull test is applied for smaller ball diameters, some incidence of unconventional failure mechanisms, such as cohesive failure of the ILD, is to be expected and allowed. A wire pull should only be considered a failure if the ball lifts and shows poor intermetallic formation or if the wire pull fails at a pull-force substantially below the \"norm\" for that ball diameter.","PeriodicalId":410140,"journal":{"name":"2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":"{\"title\":\"Wire pull on fine pitch pads: an obsolete test for first bond integrity\",\"authors\":\"V. Sundararaman, D. Edwards, W.E. Subido, H.R. Test\",\"doi\":\"10.1109/ECTC.2000.853187\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work focuses on the validity and applicability of the wire pull test being used as a measure of first bond integrity of wire bonds on fine pitch pads used in advanced silicon technology devices. The effect of geometry of the wire bond is studied by considering variations in the angle of force application during the wire pull test and the presence of nonintermetallic region (de-bonds) created by a probe mark under the ball. This paper does not address the effects of the silicon-level interconnect structure underneath the bond-pads, i.e., it is assumed that the underlying structure is defect-free, and the layers of interconnect metal and interlayer dielectric (ILD) are modeled along with the silicon as a smeared homogeneous material. Experimental data that corroborate the findings from the finite element analyses are also presented. Results from this work indicate that if the wire pull test is applied for smaller ball diameters, some incidence of unconventional failure mechanisms, such as cohesive failure of the ILD, is to be expected and allowed. A wire pull should only be considered a failure if the ball lifts and shows poor intermetallic formation or if the wire pull fails at a pull-force substantially below the \\\"norm\\\" for that ball diameter.\",\"PeriodicalId\":410140,\"journal\":{\"name\":\"2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070)\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"18\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ECTC.2000.853187\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ECTC.2000.853187","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 18

摘要

这项工作的重点是有效性和适用性的拉线测试被用来衡量钢丝键的第一键完整性在先进的硅技术设备中使用的细间距垫。通过考虑在拉丝测试过程中施加的作用力角度的变化以及球下探针标记产生的非金属间区(脱键)的存在,研究了金属键合几何形状的影响。本文没有讨论键合垫下面的硅级互连结构的影响,即假设底层结构是无缺陷的,并且互连金属层和层间介电层(ILD)层与硅一起作为涂抹均匀材料建模。实验数据也证实了有限元分析的结果。这项工作的结果表明,如果钢丝拉力测试应用于较小直径的球,一些非常规的破坏机制,如ILD的内聚破坏,是可以预料和允许的。只有当钢球举升并显示金属间形成不良,或者钢球的拉力大大低于该钢球直径的“标准”时,拉线才被认为是失败的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wire pull on fine pitch pads: an obsolete test for first bond integrity
This work focuses on the validity and applicability of the wire pull test being used as a measure of first bond integrity of wire bonds on fine pitch pads used in advanced silicon technology devices. The effect of geometry of the wire bond is studied by considering variations in the angle of force application during the wire pull test and the presence of nonintermetallic region (de-bonds) created by a probe mark under the ball. This paper does not address the effects of the silicon-level interconnect structure underneath the bond-pads, i.e., it is assumed that the underlying structure is defect-free, and the layers of interconnect metal and interlayer dielectric (ILD) are modeled along with the silicon as a smeared homogeneous material. Experimental data that corroborate the findings from the finite element analyses are also presented. Results from this work indicate that if the wire pull test is applied for smaller ball diameters, some incidence of unconventional failure mechanisms, such as cohesive failure of the ILD, is to be expected and allowed. A wire pull should only be considered a failure if the ball lifts and shows poor intermetallic formation or if the wire pull fails at a pull-force substantially below the "norm" for that ball diameter.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信