用于集成化学分析系统的最小死体积微阀

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.149077

S. Shoji, B. van der Schoot, N. D. de Rooij, M. Esashi

{"title":"用于集成化学分析系统的最小死体积微阀","authors":"S. Shoji, B. van der Schoot, N. D. de Rooij, M. Esashi","doi":"10.1109/SENSOR.1991.149077","DOIUrl":null,"url":null,"abstract":"Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 mu l/min to tens of mu l/min. These valves are useful for constructing integrated chemical analyzing systems.<<ETX>>","PeriodicalId":273871,"journal":{"name":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","volume":"110 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"48","resultStr":"{\"title\":\"Smallest dead volume microvalves for integrated chemical analyzing systems\",\"authors\":\"S. Shoji, B. van der Schoot, N. D. de Rooij, M. Esashi\",\"doi\":\"10.1109/SENSOR.1991.149077\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 mu l/min to tens of mu l/min. These valves are useful for constructing integrated chemical analyzing systems.<<ETX>>\",\"PeriodicalId\":273871,\"journal\":{\"name\":\"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers\",\"volume\":\"110 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-06-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"48\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.1991.149077\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.1991.149077","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 48

摘要

常开、常闭、三通微阀相继问世。这些微阀结构简单，死体积小，约为数十个nl。每个微阀由堆叠式压电执行器驱动，可控流量范围为1 μ l/min至数十μ l/min。这些阀门对于构建综合化学分析系统是有用的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Smallest dead volume microvalves for integrated chemical analyzing systems

Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 mu l/min to tens of mu l/min. These valves are useful for constructing integrated chemical analyzing systems.<>

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

自引率

0.00%

发文量