选择化学品供应系统时的管理考虑

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI:10.1109/SMTW.2004.1393762

Chun-Hung Tsai, Yu-Chung Lin, C. Hsu, Rong-Tian Cheng, C. Chang, Yung-Chao Lin, Po-Jen Chao

{"title":"选择化学品供应系统时的管理考虑","authors":"Chun-Hung Tsai, Yu-Chung Lin, C. Hsu, Rong-Tian Cheng, C. Chang, Yung-Chao Lin, Po-Jen Chao","doi":"10.1109/SMTW.2004.1393762","DOIUrl":null,"url":null,"abstract":"This paper discusses considerations in choosing a chemical supply system for semiconductor fabs. We investigate the characteristics of three major supply systems, drum, lorry and dilution system. The initial costs and footprints are totally different among them. Based on the cost analysis, this paper provides a simple criterion of using the lorry supply system. Besides discussion, information of leading fabs in each field is benchmarked in this paper","PeriodicalId":369092,"journal":{"name":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Management considerations in choosing a chemical supply system\",\"authors\":\"Chun-Hung Tsai, Yu-Chung Lin, C. Hsu, Rong-Tian Cheng, C. Chang, Yung-Chao Lin, Po-Jen Chao\",\"doi\":\"10.1109/SMTW.2004.1393762\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper discusses considerations in choosing a chemical supply system for semiconductor fabs. We investigate the characteristics of three major supply systems, drum, lorry and dilution system. The initial costs and footprints are totally different among them. Based on the cost analysis, this paper provides a simple criterion of using the lorry supply system. Besides discussion, information of leading fabs in each field is benchmarked in this paper\",\"PeriodicalId\":369092,\"journal\":{\"name\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMTW.2004.1393762\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMTW.2004.1393762","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文讨论了半导体晶圆厂化学供应系统选择的考虑。我们研究了三种主要供应系统的特点，鼓，卡车和稀释系统。它们之间的初始成本和足迹完全不同。在成本分析的基础上，提出了使用货车供应系统的简单准则。除了讨论之外，本文还对各个领域的领先晶圆厂的信息进行了基准测试

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Management considerations in choosing a chemical supply system

This paper discusses considerations in choosing a chemical supply system for semiconductor fabs. We investigate the characteristics of three major supply systems, drum, lorry and dilution system. The initial costs and footprints are totally different among them. Based on the cost analysis, this paper provides a simple criterion of using the lorry supply system. Besides discussion, information of leading fabs in each field is benchmarked in this paper

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)

自引率

0.00%

发文量