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引用次数: 3
摘要
近间隔升华法(CSS)对于高速率沉积cd /CdTe薄膜太阳能组件具有吸引人的特点。CSS已成功实现了0.6 m × 1.2 m和1.2 m × 1.6 m的CdTe太阳能电池板的商业化生产。CSS生长模型是指导CdTe薄膜沉积和CSS设计的有效工具。本文建立了含氧条件下CdTe沉积的扩散限制、升华限制和反应限制的生长模型。该模型可以解释源与衬底温度、环境气体压力以及源与衬底之间的分离对CSS中CdTe生长速率的影响。该模型可能对CSS过程的设计变量(压力、温度等)的优化非常有用。
The growth model of CdTe thin film by close spaced sublimation
Close spaced sublimation (CSS) has attractive features for high-rate deposition of CdS/CdTe thin film solar modules. CSS has been successfully implemented in commercial production of CdTe solar panels with size of 0.6 m × 1.2 m and 1.2 m × 1.6 m. A CSS growth model is a useful tool to guide the CdTe thin film deposition and the design of CSS. In this paper, a growth model was developed for CdTe deposition including diffusion limited, sublimation limited and reaction limited with the presence of oxygen. The model can explain the effect of source and substrate temperature, ambient gas pressure and the separation between source and substrate on the growth rate of CdTe by CSS. The model may prove very useful for optimization of the CSS process with respect to its design variables (pressure, temperature, etc.).
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